Scanning probe microscope (SPM) ultra-high-vacuum (UHV) system MULTIPROBE S

The MULTIPROBE S forms the basis of the MULTIPROBE range and is the foundation for the larger MULTIPROBE P and MULTIPROBE RM variants. The MULTIPROBE S is a single chamber surface science UHV system with large multi-technique analysis chamber for electron spectroscopy, UHV scanning probe microscopy and sample preparation. A sample transfer system facilitates the sample transfer between SPM, analysis chamber, and fast entry sample load lock (FEL).