Specification
Energy range
400 eV to 5 keV (10 eV optional)
Max. beam current
> 10 μA @ 5 keV
> 100 nA @ 15 eV (10 eV option)
Beam diameter
between 300 μm and 2′′ @ 5 keV
Integral Port Aligner
Yes
Cathode
Yttrium oxide coated Tungsten
(optional) Iridium filament
Working distance
30 mm - 300 mm
Insertion depth
173 mm
Chamber pressure during operation
5x10-7 mbar - 1x10-8mbar
Mounting flange
CF 35 / 2¾′′ OD
Electronics Interface
TCP/IP
Software control
LabVIEW™- based Software "ProIon"
The FDG 15 uses the same proven beam generation as the FDG 150 and can be used as a substitute for all applications where e.g. the wide spread but no longer available ISE 10 (Leybold/Kremer/OMICRON) has been used in the past.
In addition the FDG 15 comes with a more flexible ion optics to adjust for longer working distances and an optional ion flux stabilization.