Photoelectron spectrometer NanoSAM Lab

processMCPAuger

UHV Gemini Electron Column: highest spatial resolution smallest e-beam spot size unique low-energy performance efficient SEM with in-lens SED NanoSAM Electron Analyser: variable energy resolution excellent sensitivity, multichannel detection Sample Handling: flexible sample size variable sample temperature (50-500K) sample tilt 60 The NanoSAM Lab is the ultimate tool for the analysis of small structures. Driven by the unique performance of the UHV Gemini electron column, it guarantees unrivalled resolution below 5 nm in Scanning Auger Microscopy (SAM) and better than 3 nm in SEM. In contrast to other Auger tools, the extremely good resolution is not only available at standard 20 keV beam energy, but even at 5 keV the SAM resolution remains below 10 nm. This allows operation in a parameter range where the Auger cross sections are high, and well documented for quantitative analysis.