High-precision, configurable, fast, digital flow sensor for OEM
Specification
Mass flow
Full scale flow rate - 1, 2 and 5 - slm -
Full scale flow rate - 50, 100, 200 and 500 - sccm -
Accuracy - 0.2%FS or 2% SP - -
Maximum operating pressure - 10 - bar -
Calibration - Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 - flow -
Fluidic connector ports - Downmount - -
Generic
Supply voltage - 14 - 26.4 - V -
Average supply current - 50000 - uA -
Max. supply current - 320000 - uA -
Interfaces - RS485 - -
Size (LxWxH) - 34 x 25 x 62.2 - mm³