Mass flow sensor SFM5330
volumeairOEM

Mass flow sensor - SFM5330 - Sensirion - volume / air / OEM
Mass flow sensor - SFM5330 - Sensirion - volume / air / OEM
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Characteristics

Type
mass, volume
Applications
air, OEM
Other characteristics
high-precision

Description

High-precision, configurable, fast, digital flow sensor for OEM Specification Mass flow Full scale flow rate - 1, 2 and 5 - slm - Full scale flow rate - 50, 100, 200 and 500 - sccm - Accuracy - 0.2%FS or 2% SP - - Maximum operating pressure - 10 - bar - Calibration - Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6 and C4F8 - flow - Fluidic connector ports - Downmount - - Generic Supply voltage - 14 - 26.4 - V - Average supply current - 50000 - uA - Max. supply current - 320000 - uA - Interfaces - RS485 - - Size (LxWxH) - 34 x 25 x 62.2 - mm³

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