Mass flow controller SFC3000

for gasdigitalfor OEM

The mass flow controller SFC3000 offers fast and accurate control of gas flows over a wide range. Its high accuracy and fast settling time is mainly based on the innovative CMOSens® Technology. Thereby the digitally calibrated and temperature compensated sensor signal is converted directly into a signal which is used in the digital controlling circuit to control the valve. The SFC3000 is a small, fully digital mass flow controller for high-volume OEM applications. Its excellent stability and repeatability make it ideal for analytical instruments. Different gas types and control ranges can be calibrated and switched by software. Specification Mass flow Accuracy - ±0.2sccm ± 2% SP - - Fluidic connector ports - Downmount - - Generic Supply voltage - 14.25 - 15.25 - V - Max. supply current - 330000 - uA - Interfaces - RS485 - - Size (LxWxH) - 70 x 25 x 73 - mm³