Stepper NPS300

Advanced R&D and pilot line oriented, the NPS300 is a high accuracy and high force Stepper designed for nano-imprinting. Optimized for replication of nanostructures with ± 0.5 μm accuracy, the NPS300 is the first ever tool able to combine aligned Hot Embossing Lithography and UV-NIL on a same platform. The NPS300 is able to print sub-20 nm geometries with an overlay accuracy of 250 nm. Its flexible architecture offers an excellent process reproducibility and a unique ability to pattern large areas, in a sequential Step & Repeat mode on wafers up to 300 mm. It enables the low cost manufacturing of large stamps featuring repeated patterns. • ± 0.5 μm accuracy • Step & Repeat mode on wafer up to 300 mm • Automatic stamp pick-up • Air bearing technology and granite structure ensuring long-term stability and reliability • Control of parallelism to guarantee very high accuracy even under high forces • Hand free/full automated calibration • Automatic cycle and operator independent • High yield thanks to a stiff design • Process recording for development, log files to track production