Voltage amplifier ECA

switchinghigh-voltagebipolar

Typical Application: Electrostatically driven material handling,Semiconductor Wafer Processing,Non-mechanical transfer of flat sheets or other processed materials sensitive to mechanical handling ECA series are high voltage amplifiers for electrostatic chucks (E-Chuck, ESC). In addition to polarity switching and forced grounding, this series also offers a wafer monitoring system for wafer inspection needs. Additionally, with a wide voltage range, the series supports Coulomb and Johnsen-Rahbek electrostatic chucks. Features and Benefits: Reliable clamp/release state detection by wafer sensor Fast response of amplifier architecture design ("no relay polarity inversion" design for high reliability and long life.) "Dual channel independent control (option)" and "center tap voltage setting (option)" for various chuck/release operations Equipped with LAN, USB, RS-232C digital interface Built-in low-pass RF filter (13.56 MHz) Optional CT Center tap bias 0 to ±[maximum rate voltage - voltage set point] Optional ET Ethernet CAT interface Optional DS Dual channel independent control Optional AC AC 100V to 240V 1 φ input Optional L7 Output high voltage cable 7m x 3 (2 when CT or DS is selected)