CCD Series Electric Ultra-High Vacuum Gate Valve
Applicable range (Pa) - 105~1.3×10-7
Gas leakage rate (Pa.L/S) - ≤1.3×10-7
≤1.3×10-7
Valve”s roasting temperature(℃) - ≤150(Except the drive device)
Pressure difference when opening the valve”s plates (Pa) - ≤3×103
Power supply pressure - AC220V/50Hz
On or off time S - ≤50