PVD deposition machine Multi950

PECVDmagnetron sputteringarc evaporation

PECVD & Magnetron Optical Films Deposition System Polyhedron Structure Vacuum Coating Machine The Multi950 machine is a customized multiple functions vacuum deposition system for R&D. With half year’s discussion with Shanghai University’s team leaded by Professor Chen, we finally confirmed the design and configurations to fulfill their R&D applications. This system is able to deposit transparent DLC film with PECVD process, hard coatings on tools, and optical film with sputtering cathode. Based on this pilot machine design concept, we have developed 3 other coating systems after then: 1. Bipolar Plate Coating for Fuel Cell Electric Vehicles- FCEV1213, 2. Ceramic Direct Plated Copper- DPC1215, 3. Flexible Sputtering System- RTSP1215. These 4 models machine are all with Octal chamber, flexible and reliable performances are extensively used in various applications. It is used in the coating processes that requires many different metal layers: Al, Cr, Cu, Au, Ag, Ni, Sn, SS and many other non-feromagnetic metals; plus the Ion source unit, efficiently enhance films adhesion on different substrate materials with its plasma etching performance and, the PECVD process to deposit some carbon-based layers. The Multi950 is the milestone of advanced design coating systems for Royal Tech. Here, we are grateful to Shanghai University students and especially Process Yigang Chen, his creative and selfless dedication are big values and inspiration for our team.