CVD deposition machine RT-Parylene Coating-CVD-1

parylenevacuumfor optoelectronics

What is parylene? It is a transparent and colorless polyester protective material. It is suitable for vacuum coating at room temperature, and the vacuum coating pressure is below 10-5 Torr, while the Parylene coating process is about 0.1 Torr. The thickness of the coating can be controlled between 1-100 microns. The coating is a patent developed by the United States in the early 1960s. It was first applied to the field of microelectronic components for US military printed circuit boards, aerospace and underwater launch devices, 1972 Included in the U.S. military standards in: MIL-I-46058C Micro and nano processing technology: chemical vapor deposition (CVD) Put the powdered nano-materials into the evaporation chamber of the vacuum nano-coating equipment, and evaporate into gaseous molecules at a temperature of 150℃-180℃. Under the action of vacuum (1.0*10-2torr), the gaseous nanomolecules below 10nm enter into the cracking In the cracking chamber, the high temperature at 680°C-700°C is cracked into reactive monomers, and the active monomers and monomers are re-polymerized to form a dense and pinhole-free nano-film layer. Applications: 1.Circuit board coating: Parylene vacuum vapor phase coating can enhance circuit embedding and eliminate surface moisture, metal ions and other pollutants. The function of resistance, thermocouple and other components is not changed in the coating. Parylene coating can protect sensitive components in engineering circuits.