Stationary thickness gauge SKM-iFTM series

filmspectral reflectance

Imaging film thickness monitor is a metrology tool that can visualize the film thickness distribution of a transparent multilayer film. It can visualize the film thickness distribution with 0.1nm thickness resolution by using the spectroscopic reflectometry. Visualize film thickness uniformity Measure the film thickness/quality in the microscope field of view, Show the 3-D distribution Film thickness resolution : <0.1nm Good thickness resolution equivalent to the spectrometry tools. The wavelength can be selected from 450nm to 750nm with 1nm precision. High speed / Multilayer measurement up to 9 layers Parallel processing by the spectroscopic reflectometry Advanced applications ① Several hundred repeated film such as the Bandpass Interference Filters and Composite multilayer film such as the Trench structure ② Sub micron pattern density estimation using Effective Medium Approximation (EMA) ③ Local area crystallinity evaluation such as Laser annealing