A new evaluation system for measuring the material strength of micro regions, such as semiconductors, LSI, ceramics, hard disks, vapor deposited films, and thin coating layers, not addressed by previous hardness testers. It can also be used to evaluate the hardness of plastics and rubbers. This instrument uniquely measures dynamic indentation depth, not the indentation after the test. This in turn permits measurement of very thin films and surface (treatment) layers that are impossible to measure with conventional methods. Additionally, this same method supplies the data needed to calculate elastic modulus on the test specimens.
1.Evaluation of Hardness and Material Parameters in Accordance with
Standards (ISO 14577-1 Annex A)
2.Highly Precise Evaluation of Elastic Modulus
3.Low Test Force with Measurement Resolution of 0.196 μN...
Evaluation of Hardness and Material Parameters in Accordance with Standards (ISO 14577-1 Annex A)
Measure the behavior of a specimen as an indenter is pressed into it and evaluate the hardness, elastic modulus, and amount of work done during indentation, in compliance with and ISO 14577-1 (instrumented indentation test for hardness) Annex A.
Highly Precise Evaluation of Elastic Modulus
Perform highly precise evaluation of the elastic modulus, using correction based on instrument rigidity and the shape of the intender tip*1.
Low Test Force with Measurement Resolution of 0.196 μN
Control the test force using a high resolution of 0.196 μN. This allows measurement of material strength properties in micro regions and in the outermost surfaces of specimens.