An automatic analysis system that can be used with confidence from your first analysis
Equipped as standard with enhanced functionality to support analyses
Automatic contaminant recognition system
Highest class S/N
Length measurement function
Original library of high hit ratios*
Contaminant analysis program
Spectrum advisor function
*Optionally available
The wide-field camera and microscope camera help observe samples efficiently. In addition to observing a large area up to 10 × 13 mm, the wide-field camera also supports variable digital zooming. Furthermore, by sharing positional information with the microscope camera, it achieves a digital zoom function capable of zooming to a magnification of about 330× for observing areas as small as 30 × 40 µm. (The microscope camera supports variable digital zoom magnifications up to 10×.)
Infrared spectra can be measured while checking a visible image of the sample. Spectra can be measured while confirming the position of objects, which avoids the trouble of switching back and forth between visible light and infrared light. Used in combination with the tiling function, visible observations, and infrared measurements can be performed anywhere within the stage operating range, eliminating the need to reposition the sample.
The functionality for automatically recognizing objects is included standard. The analyst simply clicks one button for the software to automatically recognize objects.