FS6122 series mass flow sensors offer a unique solution for multi-parameter flow
measurement with mass flow, gauge pressure, temperature, and humidity. It is designed for
medical respiratory equipment and can also be applied for general purpose flow metering and
control applications. The sensors were designed with a super-low pressure loss. The current models can be readily applied to medical applications such as a ventilator, respiratory analyzer, CPAP, and other applications such as environmental monitor; and many process control applications.
FS6122 can measure a uni- or bi-directional flow up to 250 SLPM, and ±100 cmH2O gauge pressure, as well as temperature and relative humidity. The connectors can be fully customized.
Specifications
Flow Range ±250.0 / 0~100...250 SLPM
Accuracy ±(2.5+0.5FS) %
Pressure Range ±100 / -5~100f / -5~40 (gauge) cmH2O
Accuracy ±1.0 %
Temperature Range -10 ~ 60 Vdc
Accuracy ±0.5 %
Humidity* Range 0~100 (no condensation) %RH
Accuracy ±2.0 (20~80%RH); ±5.0, others %
Humidity response 5.0 (25~75%RH) sec
Other response time 1.8 msec
Power supply 5.0 (±5%) Vdc
Compensation range -5 ~ 60 °C
Output I
2C / 0.5~4.5 Vdc linear flow or pressure
Mechanical ISO22mm or adapters
Pin-out 6 pins, AMPMODU MTE, or compatible
Calibration Air @ 20°C, 101.325 kPa (flow, pressure)
Storage temperature -20 ~ 70 °C