MF5100 series mass flow meters are designed for a large dynamic range (200:1) and high
accuracy of 1.5% of reading in flow metering and control applications. With Siargo's proprietary
MEMS mass flow sensing technology, the meter can automatically recognize the registered gases and be powered with a lithium-ion battery for long-lasting operation. The current models can be readily applied to applications with multiple gas process control and flow efficiency calibration, as well as applications requiring mobile power.
MF5100 can measure a flow up to 100 SLPM. The connectors can be fully customized.
Specifications
Flow range 0~30 (MF5106) / 0~50 (MF5108) / 0~100 (MF5110) SLPM
Initial flow rate 0.01 / 0.01 / 0.02 SLPM
Accuracy ±1.5 %
Repeatability 0.25 %
Response time 250 msec
Long term stability 2 Year
Output* LCD / Digital: RS485 / Pulse
Pressure rating 1.0 MPa
Burst pressure 1.5 MPa
Temperature -10 ~ 55 °C
Humidity <95 (no condensation) %RH
Pin-out DB9
Mechanical connection NPT – M 3/8”
Calibration Air @ 20°C, 101.325 kPa
Weight < 1.0 kg
Storage temperature -20 ~ 70 °C