Differential pressure sensor FSP2000
thermalcompactMEMS

differential pressure sensor
differential pressure sensor
differential pressure sensor
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Characteristics

Pressure type
differential
Technology
thermal
Other characteristics
compact, MEMS, smart
Pressure range

250 Pa, 500 Pa
(0.04 psi, 0.07 psi)

Precision

1 %, 2 %

Process temperature

Max.: 65 °C
(149 °F)

Min.: -5 °C
(23 °F)

Description

FSP2000 series dual pressure sensors offer the unique combination of a differential and a gauge pressure sensor utilizing the MEMS thermal and piezo sensing technology with smart electronic circuitry. The designed sensing ranges allow that it can be readily applied to medical applications such as a CPAP ventilator for both flow and gauge pressure measurement with a small footprint per the direction of the CPAP development. FSP2000 measures a differential pressure up to ±500Pa, and gauge pressure ±100 cmH2O. Specifications Response time 1.8 msec Pressure rating 50 kPa Altitude correction Fully compensated Warm-up time (max) 10 sec Humidity 0~100 (no condensation) %RH Power supply, voltage 3.0~5.5 Vdc Power supply, minimal current 10 mA Pneumatic flow resistance <95 sccm@500Pa Output Linear, I2C Vibration 20g; MIL-STD-883E, Method 2002.4.

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