The sensors are designed for industrial process flow monitor or measurement applications, flow up to 10000SLPM, and pressure up to 1.0MPa.
FS6100 series mass flow sensors offer a unique solution for multi-parameter flow measurement with mass flow, gauge pressure, temperature, and humidity. It is designed for industrial process measurement and can also be applied for general purpose flow metering and control applications, such as compressed air where high flow rate data are required. The current models can be readily applied to food and beverage processes, industrial air management, and many process control applications.
FS6100 has a pressure rating over 1.o MPa and opted with gas concentration measurement for two gas mixture. With a 50 mm (2”) diameter, it can measure up to 10000 SLPM air.
Flow Range 0~100 / 0~10000SLPM
Accuracy ±(2.0+0.5FS) %
Pressure Range 0~1.0 (gauge) MPa
Accuracy ±1.0 %
Temperature Range -10 ~ 60 Vdc
Accuracy ±0.5 %
Humidity* Range 0~100 (no condensation) %RH
Accuracy ±2.0 (20~80%RH); ±5.0, others %
Humidity response 5.0 (25~75%RH) sec
Other response time 50 msec
Power supply 8~24 Vdc
Compensation range -5 ~ 60 °C
Output I2C / RS485 / 4~20mA
Mechanical BSPP / NPT
Pin-out 6 pins, AMPMODU MTE, or compatible