Calorimetric flow sensor FS1100

massvolumegas

FS1100 series mass flow sensors are manufactured with Siargo’s proprietary MEMS (micro- electro-mechanical systems) calorimetry with diffusivity sensing technologies (Thermal-D ®) that measures the calorimetry and diffusivity of the flow medium. This technology compared to conventional calorimetric sensing offers much better linearity in the full dynamic range, removes gas sensitivities for gases that have similar thermal diffusivities, and increases the measurement accuracy when used with a gas conversion factor. It also simultaneously outputs the instant flow medium temperature data and improves the temperature performance of the thermal sensing approach.