MFC2000 series are designed for general purpose mass flow control application with clean and dry gases. It utilizes the company's Thermal-D sensing chip and can be applied for non-corrosive gases with known diffusivities.
MFC2000 series mass flow controllers are manufactured with Siargo’s proprietary MEMS (micro-electro-mechanical systems) calorimetry with diffusivity sensing technologies (Thermal-D ®) that measures the calorimetry and diffusivity of the flowing medium. This technology compared to conventional calorimetric sensing offers much better linearity in the full dynamic range, removes gas sensitivities for gases that have similar thermal diffusivities, and increases the measurement and control accuracy when used with a gas conversion factor. It also simultaneously outputs the instant flow medium temperature data and improves the temperature performance of the thermal sensing approach.