Multi-axis nanopositioning system SMARPOD 70.42
hexapodwith parallel kinematicsultra-high vacuum

multi-axis nanopositioning system
multi-axis nanopositioning system
multi-axis nanopositioning system
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Characteristics

Number of axes
multi-axis
Features
hexapod
Other characteristics
with parallel kinematics, ultra-high vacuum
Repeatability

50 nm

Stroke

6 mm, 11 mm
(0.24 in, 0.43 in)

Description

The small-size SMARPOD 70.42 is the most compact system with a base plate diameter of only 70 mm and a weight of only 200 g. The SMARPOD 70.42 is the smallest hexapod-like motion system with a base plate diameter of only 70 mm. Despite its overall compactness, it is a robust and precise system that can handle payloads of up to 5 N to be positioned with 11 mm travel range in X and Y. Values for rotational travel are given for a pivot point at the surface of the top plate. The overall dimensions of the complete system may be larger for different poses. For more information, see the CAD model in the download area. The repeatability is measured about 20 mm above the top plate of each system, over the full travel range and for a single degree of freedom at a time. Values may be better for shorter travel ranges.

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Other SmarAct GmbH products

Positioning Systems

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