The SMS-20-0 consist of a motorized single slit. The internal design allows a precise positioning of the slit edges and of the slit opening within a 20 mm working range.
Two individually movable blades with their edges aligned parallel to each other allowing to set the slits width in the horizontal direction between 0 and 20 mm while allowing to define the slits position within the 20 mm by 20 mm window of the enclosure. Position sensors allow for closed-loop positioning of each blade to precisely define the size and the position of the aperture within the 20 by 20 mm window of the enclosure. Specialized versions are available for the use in high and ultra-high vacuum environments. Customized versions are also available. Please do not hesitate to contact us to discuss your specific requirements.
Mechanical
Dimensions [mm] - 75 x 75 x 20
Open-loop
Velocity [mm/s] - >20
Resolution [nm] - < 1
Closed-Loop
Closed-Loop Resolution MCS2 [nm] - 1 (S) 4 (L)
Closed-Loop Repeatability, Full Stroke MCS2 [nm] - ±30 (S) ,±60 (L)
Closed-Loop Resolution (H)CU [nm] - 50 (L)
Closed-Loop Repeatability, Full Stroke (H)CU [nm] - ± 1000 (L)
Options
Material Options - Steel base (-ST); Titanium base (-TI); Black anodized (-BK)
Vacuum Options - HV (1E-6 mbar); UHV / UHVT (1E-11 mbar)
Non-Magnetic Option - Yes (-NM)