Linear stage CLS-9292
piezoaluminumvacuum-compatible

linear stage
linear stage
linear stage
linear stage
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Characteristics

Orientation
linear
Type
piezo
Other characteristics
aluminum, vacuum-compatible, closed-loop, industrial
Stroke

63 mm
(2.48 in)

Speed

20 mm/s

Repeatability

40 nm, 200 nm

Description

The smaller one of the CLS-92 linear stages offers a footprint of 92 x 92 mm and a travel range of 63 mm. Furthermore it is able to handle payloads of up to 20 N. Linear stages of the CLS series were consistently designed for high availability applications in science and industry. They are equipped with SmarActs exchangeable drive units which guarantees easy access to the stage's core component, the piezo-drive. That makes servicing a very simple task. The drive unit can be exchanged without removing the complete device from the surrounding positioning setup. Additionally, their mounting hole pattern is perfectly matched to mount our rotation stages and goniometers. Mechanical Blocking Force [N] ≥ 3.5 Max. Normal Force [N] 20 Dimensions [mm] 92 x 92 x 17 Weight [g] - 357 Open-loop Resolution [nm] - < 1

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Linear Stages

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