Optical probe SP series

laboratoryelectrical characterization

Our standard nanoprober system with 4 or 8 closed-loop manipulators. The SMARPROBE SP4 is a probing system with up to 4 manipulators while the SMARPROBE SP8 comes with up to 8 manipulators. Each of the manipulators has 3 degrees of freedom and is equipped with nanometer-resolution optical encoders for high precision electrical probing. Smart positioning routines implemented in the dedicated control software and the ability to load up to four SEM sample stubs increase operating ease and overall throughput of any nano-probing task. The robust mechanical design ensures highest stability and ease of operation. The probing systems are compatible with a wide variety of FIBs, SEMs and optical microscopes and are thus perfectly suited to retrofit existing probing setups and for the integration into new instruments. The SMARPROBE probing systems allow for electrical characterization techniques from 2-contact EBIC/EBAC up to 4- and 6-point probing measurements which makes the SMARPROBE an indispensable tool for your failure analysis laboratory. Manipulator with Probe Mount - XYZ closed-loop Number of Manipulators - ≤ 4 / ≤ 8 Sample Stage - XYZ closed-loop Control - Point & Click, Joystick Probing Area [mm] - 25 x 25 Scan-Range in XYZ1 [µm] - 3 Thermal Drift2 [nm/min] - 1 - 10