Exceptional performance
Fully encoded with 1 nm resolution
Active position holding
Large scan-range and low thermal drift
Large area probing on full 30 x 30 mm
High-speed EBAC/EBIC imaging
Efficient and easy
All-in-one user interface
Automatic landing and alignment of all probes
“Point & Click” navigation within the SEM image
Group movements and “Step & Repeat”
CAD navigation for sample and probes