High-load stage CHS-9257-1D-15

linearpiezolong-travel

This long travel high load stage is equipped with SmarAct's exchangeable drive unit, which allows the complete piezo drive to be removed from the stage when required for servicing. Since the drive unit is accessible from the stage's side, the device does not need to be removed from the positioning setup during servicing. The mechanical design is based on an actuated wedge which guarantees highest resolution of the stages' motion. A separate guideway assures a straight movement along the load direction and allows an integration of a position sensor for direct position feedback and closed-loop operation. The mountinghole pattern supports an easy screwing to the linear stages of the CLS92-Series. Optionally, the maximum lift force can be increased upon request. Mechanical Max. Lift Force [N] - 15 Dimensions [mm] - 92 x 92 x 57 Weight [g] - 935 Closed-Loop Sensor Resolution MCS2 [nm] - 1 (S), 4 (L) Uni-Directional Repeatability MCS2 [nm] - ± 40 (S,L) Sensor Resolution (H)CU [nm] - 100 (L) Uni-Directional Repeatability (H)CU [nm] - ± 200 (S,L) Options Material Options - Aluminum base as standard; steel base (-ST); titanium base (-TI); black anodized (-BK) Vacuum Options - HV (1E-6 mbar); UHV (1E-11 mbar)