Recirculation chiller for the semiconductor industry HRZ-F series

high-performancewater-cooled

HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®. HRZ-F, SEMI Standard Double Inverter Chiller, for Fluorinated Coolant HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®. HRZ-F, SEMI Standard Double Inverter Chiller, for Ethylene Glycol Coolant HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with a 60% ethylene glycol aqueous solution for the coolant. HRZ-F, SEMI Standard Double Inverter Chiller, for Tap or DI Water Coolant HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C.