High-vacuum valve XL series
ballelectrically-actuatedfor gas

high-vacuum valve
high-vacuum valve
high-vacuum valve
high-vacuum valve
high-vacuum valve
high-vacuum valve
high-vacuum valve
high-vacuum valve
high-vacuum valve
high-vacuum valve
high-vacuum valve
high-vacuum valve
high-vacuum valve
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Characteristics

Type
ball
Operation
electrically-actuated
Media
for gas
Body
aluminum, anodized aluminum, light alloy
Applications
high-vacuum
Number of channels
2-way
Other characteristics
corrosion-resistant, high-temperature, in-line, double-acting, single-acting, with seal, with bellows seal, electromagnetic
Pressure

0 Pa
(0 psi)

Temperature

Max.: 150 °C
(302 °F)

Min.: 5 °C
(41 °F)

Flow rate

Max.: 200 l/s
(52.83 us gal/s)

Min.: 5 l/s
(1.32 us gal/s)

Description

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

VIDEO

Catalogs

Série XL
Série XL
27 Pages
MGP series
MGP series
36 Pages
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.