Solberg’s WL Series medium to high vacuum filters are designed for industrial and Semicon processes that require a verified leak rate and operate in medium to high vacuum conditions. The WL Series has various vacuum-specific connection options, including ISO vacuum fittings and numerous filter media options for superior protection and system longevity. Housings in this series are 100% helium-leak tested to ensure vacuum integrity with verified leak rates of 1x 10-5 mbar l/s or better.
Solberg’s WL Inlet Vacuum Filter Series offers multiple configurations, including:
High-Efficiency Filtration
Chemical Adsorption
High-Temperature Materials of Construction
Features
NW16 - NW40 Flange Connections:
ISO flange connections
Stainless steel ISO flange
Buna o-ring sealed
Seamless drawn housings
Corrosive resistant carbon steel construction
Powder coat finish (black models)
O-ring housing seal
Stainless steel torsion clips
K100 - K320 Connections:
ISO-K stainless steel flanges standard
Machined flange surface to RMS63, uncoated
High quality vacuum service components
Corrosive resistant black powder coat carbon steel
KF10 differential ports for accurate vacuum ΔP readings
Machined & polished sealing surfaces on ISO flange faces for reliable vacuum performance on all flange types
K200 housings and larger have domed lid to minimize deflection and increase durability