Chemical Bath Temperature Control System
On-board temperature control unit; works with the Switchback Power Supply or Power Supply/Temperature Controller to replace a remote chiller.
Low flow, one-pass chemical temperature control
Direct cooling of process fluid in wet benches.
For 3-30 gallon semiconductor chemical baths in near-ambient applications
Operating Range: - 10°C to 35°C
Ambient Temperature: - 10°C to 40°C non-condensing
Stability / Repeatability: - ± 0.05°C (with typical configuration)
Cooling Capacity: - 800 Watts @ 25°C with 20°C facility water
Heating Capacity: - 1000 Watts @ 25°C with 20°C facility water
Process Fluid: - Up to 50% HF solution, organic solvents, other PFA Teflon compatible fluids, electroplating baths
Facility Water: -
2-4 gpm (8-15 lpm) @ 10-35°C filtered, treated
recirculating facility cooling water with pH: 6.5 to 8.2
Process Fluid Flow Rate: -
4-10 gpm (15-38 lpm) with parallel flow (4:1 fittings)
0.5-2 gpm (2-8 lpm) with series flow (Low flow Option)
Maximum Pressure: -
Process: 90 psig
Facility: 100 psig
Teflon Fittings: - 3/4" or 1" Flaretek, or Teflon tube stub
Facility Water Fittings - 3/8" Female NPT
Wetted Materials: -
Process: HDPFA Teflon
Facility: Teflon impregnated anodized aluminum
Size (L x W x H): -
17.5" x 11.25" x 4.65" (44.4 cm x 28.6 cm x 11.8 cm) with insulation
16” x 9.75” x 3.15” (40.6 cm x 24.8 cm x 8.0 cm) without insulation
Weight: - 38 lbs (17 kg)
Power Requirements
(separate unit): - Switchback 6600 set to 0-100 VDC, 0-18.3 Amps
Standards - Semi S2-0200, F47 compliant, CE
Warranty: - 2 years