Pressure control panels for semiconductor gases from quality 6.0
Waste gas valve
Manual (pneumatic) process gas (EMO-) valve
Purge gas valve
Check valve to prevent process gas from flowing back into the puge gas line
Pre-filter
Pressure regulator
Burst disc
Filter for particle-free process gas supply
Process gas line shut-off valve
All gas-wetted parts made from stainless steel 1.4404 ESU as well as Hastelloy C and PCTFE
100 % helium-leak-tested
Assembly in cleanroom class 100/10