- Robotics - Automation - Industrial IT
- Automation
- Pressure calibration control panel
- Spectron Gas Control Systems GmbH
Pressure calibration control panel MP2stainless steelmanualpneumatic
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Characteristics
- Application
- for pressure calibration
- Other characteristic
- stainless steel, manual, pneumatic
Description
Pressure control panels for semiconductor gases from quality 6.0
Waste gas valve
Manual (pneumatic) process gas (EMO-) valve
Purge gas valve
Check valve to prevent process gas from flowing back into the puge gas line
Pre-filter
Pressure regulator
Burst disc
Filter for particle-free process gas supply
Process gas line shut-off valve
All gas-wetted parts made from stainless steel 1.4404 ESU as well as Hastelloy C and PCTFE
100 % helium-leak-tested
Assembly in cleanroom class 100/10
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.