Design optimized for low flow restriction and thorough electropolishing of the internal surfaces
Minimized internal volume for short purge times
All gas-wetted parts made of stainless steel SS 316L,Hastelloy C276 and PCTFE or PVDF respectively
Single-stage regulator
Regulator can be evacuated
Internal connectors for pressure gauges
High control accuracy
Metal-to-metal seal to atmosphere
High surface quality
All connectors UNF 9/16-18 (1/4” VCR-compatible)
Simple outlet pressure limitation by handwheel
100 % helium-leak-tested
Assembly in cleanroom class 100/10
Optional documentation acc. to SEMASPEC
Models with tied diaphragm and/or without spring in the gas-wetted area (see page 3: models)