Edge polishing machine EP-X seriesindustrialautomaticsurface
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Characteristics
- Domain
- industrial
- Other characteristics
- automatic, surface, mirror, edge
Description
The SpeedFam EP-X series are high throughput Edge Polishers for 300mm, 200mm and 150mm prime silicon wafers. As well as our unique three surface polishing (upper/lower bevels and wafer apex) we also provide orientation flat and notch region mirror polishing to remove damage and prepare the entire domain of the edge bevel area
SpeedFam has shipped about 550 Edge Polishers for prime wafers since 1988. The SpeedFam Edge Polisher is the global standard in edge preparation used in prime wafer factories all over the world. SpeedFam supports 300mm, 200mm and 150mm prime wafer production.
The SpeedFam EP-X series are high throughput Edge Polishers for 300mm, 200mm and 150mm prime silicon wafers. As well as our unique three surface polishing (upper/lower bevels and wafer apex) we also provide orientation flat and notch region mirror polishing to remove damage and prepare the entire domain of the edge bevel area.
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.