SCI TRM-Bar™ and QRM-Bar™ magnetics give you the flexibility you need. Provided with encapsulated magnets, magnet assemblies are adaptable to fit your process requirements.
SCI advanced magnetic system features include:
Multiple magnetic designs to fit your application requirements
Advanced magnetics designed using 3D finit element analysis software
Carefully matched, hi-strength magnets that are factory calibrated using an automated magnet bar measurement tool
Fully encapuslated magnets and robust construction for many years of trouble-free operation
Long-life, multi-roller system for sputter up, sputter down, or off-angle sputtering
Magnetic uniformity adjustment can be done easily in the field
Simple installation procedure with solutions for vertical installations
Features
TRM-Bar™
Industry-proven design with thousands of bars currently in operation
High rate reactive mode or metal mode sputtering of optical grade films
mQRM-Bar™
Small magnet 4-row design increases strength by 50% over the TRM
No plasma-forming fringe field
Lower impedance than the TRM
QRM-Bar™
Stronger "patent pending" magnetics for low impedance sputtering of TCOs and other electrical grade films
Increased sputtering efficiencies reduce power consumption and operating costs
SRM80-Bar™ and TRM80-Bar™
High-strength magnets that are hermetically sealed
Advanced magnetics designed using 3D finite element analysis software
Magnets are matched in strength within 1%
Large magnet, single row design
Easily installed in any possible orientation