INDUCTIVE PIEZO VERTICAL STAGE
1. Offers 1 kind of travel range which is 10 mm
2. The maximum loading is 150 g
3. 37 nm typical resolution"
DESCRIPTION
The inductive sensing element is applied as the core for position feedback. This product series provides not only the practical positioning resolution but also the more compact size, the better tolerance for the environment and the competitive price. It is highly adaptable to any application requiring high-precision positioning, micro-nano motion control as well as in the vacuum environment.
The inductive piezo vertical stage offers 1 kind of travel range which is 10 mm. The maximum loading is 150 g with 37 nm typical resolution.