4-axis positioning system 782300:183.26

XYZlinearwith DC motor

XY-2Z 4-Axis Gantry with aperture Customizable • Ideal for spot differential height measurements in continuous motion • Double-sided Z-sensor positioners for the 70 x 100 mm aperture • Vibration damped design with excellent processing values for repeatability up to 1µm • Reduction of emission due to air-bearing sample carriers • Outstanding lifetime and maintenance-free 24/7 operation This XYZ gantry positioning system allows high precision bilateral inspection processes with 2 custom sensors / microscopes each for different metrology applications. The first Z-axis is located on the stationary traverse, the second sensor / microscope is mounted on the Z-axis below the aperture. The air-bearing sample holder moves the sample in XY direction to the aperture with the two sensors on the Z-axes, each of which can be adjusted in height of 100 mm. Specifications: - Standard System: PLT165-DLM (XY) / PMT160-DC (Z1, Z2) - Stroke: 600 x 600 x 100 x 100 mm - Repeatability: 0.2 – ±2 µm - Speed: 500 - 1000 mm (XY) / 10 - 20 mm (Z) - Max. load: 150 N (Z) - Drive: linear motor (iron core), Profile Rail (XY) | ball screw, DC-Motor, cross roller (Z) - Feedback: linear scale - Motion Controller: ACS, PLC integration Customized options: - Adaptation of travel ranges, carriers and length combinations - Safety enclosure and different base plates - Wipeable, chemical-resistant surfaces - ISO 14644-1 versions (up to class 1 on request) - Individual solution development with 3D design for the positioning task - Aperture: 70 x 100 mm - Length x width x height: 1850 x 1920 x 1150 mm