XYZ positioning system 782430:002.26

portallinear motor-drivenservo-driven

Customizable: • Ideal for automated inspection of wafers, probe cards and printed circuit boards • Inspection of multiple objects simultaneously through travels up to 720 mm • Ideal for integration of two processes simultaneously • Low-maintenance 24/7 operation and flexible maintenance concept due to fast system exchange on the granite structure This inspection system consists of four cleanroom axes and enables automated measurement of multiple objects simultaneously. High dynamics and highest reproducibility are achieved. A high-resolution camera or sensor is moved relative to the sample to inspect geometries, perform measurements and document special quality features. Specifications: - Standardkomponente: PMT290-EDLM (XY) - Travel: 720 mm (XY) / 100 mm (Z) - Repeatability: ± 0.3 – ± 0.7 µm (XY) / ± 1.5 – ± 2.5 µm (Z) - Speed: 750 mm/s (XY) / 150 mm/s (Z) - Max. load: 150 N (XY) / ± 200 N (Z) - Max. sample dimension: [Ø] 12 inch / 300 mm - Length x width x height: 1230 x 1200 x 1030 mm - Drive: Ironless Dynamic Linear Motor (XY) | AC-Servo, Ball Screw (Z) - Feedback: Linear Scale (XY) | Motor-Encoder (Z) - Clean room variants: up to ISO class 2 Customized options: - Clean room suitability for clean room ISO 14644-1 class 2 (up to class 1 on request) - Connections for exhaust and revolving belt covers - Available also as single portal - Ready-to-use control system with pre-configured controller incl. sample softwareVerfügbar auch als Einzelportal