3-axis positioning system 782489:001.26

linearfor microscopyball screw

XYZ Microscopy and Inspection Station for high resolution Customizable: • Ideal for sample inspection • High precision repeatability up to 0.3 µm • Reduction of measurement deviations to less than 3 µm This 3-axis positioning system is designed for high-precision metrology applications where the stage moves the object to be measured to the sensor or camera on the Z-axis. The xy stage consists of the reliable KT310 with a DC motor design. Specifications: - Travel: 200 mm (XY) / 200 mm (Z) - Repeatability: ± 0.3 - ± 0.7 µm (XY) - Positoning speed: 25 mm/s (XY) / 15 mm/s (Z) - Max. load Fx/ Fy: 45 N (XY) - Max. load Fz: 110 N (XY) / 150 N (Z) - Motor: DC-Motor, Ball Screw (XY) / Manuell - Feedback: Linear Scale Customized options: - Various travels up to 200 mm - With/without granite base - With/without vibration decoupling - Stepper motor, DC motor and in various measuring system resolutions - Motorized Z-axis e.g. with MT130 or PMT 160 - Rotatory movements in combination with DT200 - Versions for clean room ISO 14644-1 (up to class 1 on request) - Ready-to-use control with pre-configured controller incl. sample software