XZ-Phi system
Customizable:
• Ideal for setting up your high-precision metrology systems
• Measuring system resolutions in the submicrometer range up to 0.1 µm / 0.0001°
• High precision repeatability up to 0.3 µm
• Finest rotational movements up to 0.001°
• Low maintenance with extremely long service life
This X-Z-Phi multi-axis positioning system consists of high-precision and durable standard axes (PMT160-300-EDLM, MT130-50-DC, DT170-TM), which can be ideally combined for a high-precision measurement setup. For horizontal movements, the PMT160-300-EDLM enables the smallest step sizes in the sub-micrometer range in addition to high positioning speeds.
Specifications:
- Standard System: PMT160-DC (X) / MT130-DC (Z) / DT165-TM (Phi (Rz))
- Travel: 260 mm (X) / 50 mm (Z) / 360 mm (Phi (Rz))
- Repeatability: ± 0.3 - ± 0.4 µm (X) / ± 2.5 - ± 4.5 µm (Z) / ± 0.001 - ± 0.005 µm (Phi (Rz))
- Positoning speed: 200 mm/s (X) / 50 mm/s (Z) / 60 mm/s (Phi (Rz))
- Max. load: 14 N (X) / 95 N (Z) / 100 N (Phi (Rz))
- Motor: Ironless Dynamic Linear Motor, DC-Motor (XZ) / Torque Motor (Phi (Rz))
- Feedback: Linear Scale (XZ) / Angular Scale (Phi (Rz))
Customized options:
- Different motor variants: DC motor, stepper motor, linear motor and nanomotion
- Immediate use with pre-configured controller incl. exemplary software
- Versions for clean room ISO 14644-1