1-axis positioning system 782300:212.26

rotaryfor wafer inspection and metrologyfor the semiconductor industry

X Phi system for the positioning of optical lenses, cylinders Customizable: • Ideal for optical measurement of round parts e.g. wafers, optics • Saves the additional purchase of a loading axis due to high-precision rotary movements with stroke • High repeatability up to 0.0017 • Moves 1.9 µm precisely with X into the measuring position This X-Phi positioning system consists of high-precision and durable standard axes of the PMT160 linear stage and, for rotation, the DTS130-HM. It is ideal for measuring applications in which the specimen is moved precisely into measuring position and thus no additional feed axis is required. Specifications: - Standard System: PMT160-DC (X) / DTS130 (Phi (Rz)) - Travel: 135 mm (X) / n x 360 mm (Phi (Rz)) - Repeatability: ± 1.9 - ± 2.4 µm (X) / ± 0.0017 - ± 0.005 µm (Phi (Rz)) - Positoning speed: 10 mm/s (X) / 50 mm/s (Phi (Rz)) - Max. load: 150 N (X) / 74 N (Phi (Rz)) - Motor: DC-Motor, Ball Screw (XZ) / AC-Servo (Phi (Rz)) - Feedback: Linear Scale (XZ) / Angular Scale (Phi (Rz)) Customizable: - Travels up to 300 mm - Base plate made of granite or aluminum - Available with internal scale (270 mm) - Can be combined with other rotary stages, e.g. DT200 - Versions for clean room ISO 14644-1 possible - Immediate use with pre-configured controller incl. exemplary software