XYZ positioning system 782300:193.26

linearfor wafer inspection and metrologyfor quality control

XYZ system for inspection and quality control Customizable: • Very high runout accuracy and repeatability up to 0.3 µm • Positioning of loads up to 150 N with a cost-effective drive • High speeds up to 50 mm/s • Reduction of random errors to a minimum • Easy integration and flexible combination with existing camera systems and sensors The positioning system enables positioning along three linear axes. In this unit, a PMT160 linear stage is mounted on a KT470 cross table with an adapter bracket. It achieves low runout errors, in terms of straightness and flatness, which are achieved by using crossed rollers. Specifications: - Travel: 300 mm (XY) / 100 mm (Z) - Repeatability: ± 0.3 - ± 1.7 µm (XYZ) - Positoning speed: 25 mm/s (XY) - Max. load: 45 N (X) / 150 N (YZ) - Motor: DC-Motor - Feedback: Linear Scale Customized options: - Different travels in the Z-axis from 50 - 300 mm - Various motor variants: DC motor or stepper motor - Immediate use with pre-configured controller incl. exemplary software - Versions for clean room ISO 14644-1