XZ positioning system 782300:186.26
2-axislinearfor wafer inspection and metrology

XZ positioning system - 782300:186.26 - Steinmeyer Holding GmbH - 2-axis / linear / for wafer inspection and metrology
XZ positioning system - 782300:186.26 - Steinmeyer Holding GmbH - 2-axis / linear / for wafer inspection and metrology
XZ positioning system - 782300:186.26 - Steinmeyer Holding GmbH - 2-axis / linear / for wafer inspection and metrology - image - 2
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Characteristics

Number of axes
XZ, 2-axis
Features
linear
Applications
for wafer inspection and metrology, for laboratory applications
Other characteristics
ball screw, with DC motor, high-resolution, combined modules, with controller, high-accuracy
Repeatability

Min.: 0.4 µm

Max.: 2.2 µm

Stroke

Min.: 100 mm
(3.94 in)

Max.: 300 mm
(11.81 in)

Speed

Min.: 1.12 mm/s

Max.: 25 mm/s

Description

XZ System für Labor- und Waferinspektion Customizable: • Ideal for setting up and expanding of your application • Highly precise repeatability up to 0.4 µm • Smallest steps and highest reliability at comparatively high positioning speed of 50 mm/s • Perfect flatness of ± 1 for positioning medium loads up to 5 kg The XZ combination consists of the high-precision and durable standard linear axes of the PMT160. This combination is suitable for all applications requiring perfect flatness, smallest tolerances for pitch and yaw, and smooth running behavior. Specifications: - Standard component: PMT160-DC (XZ) - Travel: 300 mm (X) / 100 mm (Z) - Repeatability: ± 0.4 - ± 2.2 µm (XZ) - Positoning speed: 25 mm/s (X) / 1.12 mm/s (Z) - Max. load: 45 N (X) / 150 N (Z) - Motor: DC-Motor, Ball Screw - Feedback: Linear Scale Customized options: - Different travels per axis from 50 - 300 mm - Rotational movements in combination with DT130 or DT200 - Various motor variants: DC motor, stepper motor, linear motor and nanomotion - Immediate use with pre-configured controller incl. exemplary software - Versions for clean room ISO 14644-1

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Positioning systems: XYZ-R+ Multi-Axis Systems, Gantry, Portal, Laboratory Stages

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.