3-axis positioning system 782476:001.26

horizontalrotaryautomatic

MP410-3 High Vacuum Aligner up to 10E-6 mbar Customizable: • Ideal for transfer measurements in vacuum up to 10-6 mbar • Designed for large samples with an aperture of 235 mm • High repeatability up to 1 µm with a load capacity of 5 kg • Ideal force transmission due to the use of the backlash-free ball screw 1214 • Optimized price/performance ratio with precise operating parameters With this aligner, second translational movements of 15 mm in the plane and a rotation around the vertical of up to ± 5 degrees are realized. The motion R (Phi) results from the XY combination. Specifications: - Standard component: LA85 (XYRz) - Travel: ± 15 mm (XY) / ± 5 mm (Z) - Repeatability: ± 1.6 – ± 2.1 µm (XY) / ± 0.001 – ± 0.002 µm (Rz) - Positoning speed: 30 – 60 mm/s (XY) / 15 – 30 mm/s (Rz) - Max. load: 250 N (XYRz) - Motor: Schrittmotor, Kugelgewindetrieb - Feedback: Open Loop Customized options: - Adaptation to the process: aperture, holder, feeder, sensor - Configuration for clean room ISO 14644-1 (up to class 1 on request) - Individual design with rack, vibration isolation, enclosure - Individual solution development with 3D design for the positioning task