XYZ positioning system 782325:110.24

automaticindustrialfor laboratory applications

MP53-3 Miniature XYZ Positioning System Customizable: • Ideal for compact applications • Resolutions in the submicrometer range • Load capacity up to 5 N • Reliable and consistent quality by highly precise positioning The MP53 positioning system is a miniaturized 3-axis system for X, Y and Z motions with travel ranges of 10 mm. The aligner is designed with piezo motors and enables positioning increments up to a few nanometres. Specifications: - Standard system: MT53 - Travel: 10 mm (XYZ) - Repeatability: ± 0.2 - ± 0.3 µm (XYZ) - Positoning speed: 5 mm/s (XYZ) - Max. load: 45 N (XY) / 150 N (Z) - Motor: Piezo Motor, Cross roller bearings - - Feedback: Linear scale Customized options: - Optionally with high-resolution measuring system for repeat accuracies up to 0.005 µm - Combinable with rotary stages for rotational applications - Variants for vacuum up to 10-11 mbar or clean room ISO 14644-1 class 6 (up to class 1 on request) - Available as magnetic, low-magnetic and magnet-free version - Ready-to-use with preconfigured motion controller including sample software