5-axis positioning system 782497:006.26

hexapodrotaryfor the semiconductor industry

MP200-5 Miniature XYZ Phi Delta Positioning System Customizable: • ultra high resolution up to 0.007 µm • maximum positioning accuracy with ± 1.5° in Rx and Ry • load capacity up to 20 N • finest motions up to 0.07 µm due to robust, self-retaining sliding thread drives • highest resistance to interference due to solid bearing joints • absolutely constant repeatability up to ± 0.5 µm using all degrees of freedom • very compact due to the integrated 5-axis control electronics • simple power supply and a standard data interface form the connection to the superordinate system The motorized centering and levelling stage moves its five degrees of freedom extremely consistently. The system can be moved in all three directions. It can also be tilted at two angles in planarity. Specifications: - Standard component: MT63-SM - Travel: 4 mm (XYZ) / 3 mm (RxRy) - Repeatability: ± 0.07 – ± 1 µm (XYZ) / ± 0.00005 - ± 0.00020 µm (RxRy) - Positoning speed: 0.5 mm/s (XY) / 0.4 mm/s (RxRy) - Max. load: 20 N - Motor: Stepper motor (SM), Sliding thread belt - Feedback: Motor-Encoder - Transmitted light: 45 mm