Multi-axis positioning system 782497:008.26

hexapodrotaryfor wafer inspection and metrology

MP200-3 Miniature Z-Phi Delta Positioning System, Tripod As a addition to the MP200-5 aligner, which allows adjustment in five degrees of freedom, this aligner was designed with three degrees of freedom. It consists internally of three vertically acting precision axes, which are connected to the movable load plate by means of solid joints. Thus, the load plate can be tilted in two axes and also adjusted in height. Since alignment of workpieces is often sufficient, vertical adjustment can be used to compensate for lens packages of different heights, especially in optics assembly. In addition, a 5-axis manipulator with a large travel range in XY can be realized from this manipulator and a cross-transmitted light table or cross table. For example, the KDT310, KT310 or KDT235 can be used as XY systems. Specifications: - Standard component: MT63-SM (Z, Rx, Ry) - Travel: 4 mm (Z) / 3 mm (Rx, Ry) - Repeatability: ± 0.07 – ± 1 µm (Z) / ± 0.00005 - ± 0.00020 µm (Rx, Ry) - Positoning speed: 0.5 mm/s (Z) / 0.4 mm/s s (Rx, Ry) - Max. load: 20 N - Motor: Stepper motor (SM), Sliding thread belt - Feedback: Motor-Encoder - Transmitted light: 45 mm