XYZ positioning system 782327:001.26

triaxiallinearfor wafer inspection and metrology

MP210-3 XYZ Positioning System Customizable: • Ideal for limited installation space and fluctuating temperatures from 0 - 40°C • Travel ranges up to 25 mm in the minimum of space • Absolute position stability, even when the motor is switched off • Consistent measurement results due to high repeatability This XYZ system allows the positioning of a sample holder for highly stable double-sided incident and transmitted light measurements. Loading and focusing is realized by vertical movement with a stroke of 25 mm. Specifications: - Standard System: MT63 (XYZ) - Travel: 25 mm - Repeatability: ± 0.8 - ± 3.8 µm (XYZ) - Positoning speed: 1.8 – 3.6 mm/s (XYZ) - Max. load: 10 N - Motor: DC-Motor, - Lead Screw - Feedback: Linear Scale - Length x width x height: 206 x 259 x 137 mm Customized options: - Adaptation to the process: samplet, holder, feeder, sensor - Configuration for clean room ISO 14644-1 (up to class 1 on request) - Individual design with rack, vibration isolation, enclosure - Individual solution development with 3D Design for the positioning task