6-axis positioning system 786015:009.26

multi-axishexapodhorizontal

6-axis miniature XYZ-Theta-Phi-Delta positioning system (clean room ISO 5) Customizable: • Ideal for automated inspection of wafers and optics up to 300 mm / 12" • High repeatability of ± 2.5 µm or ± 0.005° • Outstanding precision, rigidity and compactness with dimensions of 520 x 600 x 155 mm • Designed for use in 3-shift operation up to clean room class ISO 5 The 6-axis manipulator includes an XY Stage in the horizontal axis and a Tripod for vertical strokes and two tilts, which combines the strengths of cartesian and parallel kinematic designs in one system. Specifications: - Standard System: MT95 (XY) / 3x MT95 (Z, Rx, Ry) - Travel: 30 mm (XY) / 20 mm (Z) / 4 mm (Rx, Ry) / n x 360 (Rz) - Repeatability: ± 1.5 - ± 3.5 µm (XYZ) / 0.0004 – 0.001 µm (Rx, Ry) / 0.05 - 0.1 µm (Rz) - Positoning speed: 1.1 - 2 mm/s (XYZ) / 0.03 –0.5 mm/s (Rx, Ry) / 100 – 200 mm/s (Rz) - Max. load: 65 N (X, Y, Rx, Ry) / 100 N (Z) / 20 N (Rz) - Motor: DC-Motor, Kugelgewindetrieb 1112, Getriebe, Riemen (X,Y, Rx, Ry) / Schrittmotor, Riemen (Rz) - Feedback: Motor-Encoder - Length x width x height: 520 x 600 x 155 mm Customized options: - Application-specific tested and ready for immediate use with plug-and-play motion controller incl. sample software - Special version for samples up to 450 mm / 18" - Different versions for clean room ISO 14644-1 (up to class 1 on request) - Modular multi-axes system with customized / exchangeable process heads - Various sample holders, integration into workflows - Individual solution development with 3D Design for the positioning task