Linear positioning stage LA80

electric1-axisprecision

LA80 High Speed UHV Linear Axis Application: fast transport stage Benefit: high life time despite dry lube Features: dry lube ball screw drive • Vacuum: all ranges HV / UHV / EUV up to 10E-11 mbar • Magnetism: magnetic • Lubrication: liquid up to 10E-8 / dry up to 10E-11 mbar • Max. bake-out temperature: 120°C Options: • Optionally with and without measuring system • Material selection and vacuum lubrication adapted to the application • Can be combined to a fast XYZ transfer system (e.g. LA90, LA95, LA170) • Individual adaptation to the installation situation in the chamber • Version for clean room ISO 14644-1 (up to class 1 on request) • Optional with motion controller FMC400/450 Technical Data • Travel: 200mm – 500mm • Repeatability: ± 3µm, ± 0.3µm (unidirectional) ± 4µm, ± 0.5µm (bidirectional) • Load: → 49 N / ↑ 9 N • Max. Speed: 100 mm/s • Motor: Stepper Motor • Bearing: Stainless Steel Hybrid Recirculating Ball Guides • Feedback: Open Loop, Linear scale • Feedback Resolution: ± 0.5 µm