Linear positioning stage LA170

linear motor-driven1-axiscrossed roller

LA170 Precise high load XYZ linear axis Application: Transport Stage, scanning stage for high loads Benefit: High life time despite dry lube Features: lead screw with dry lube or ball screw with liquid lube • Vacuum: all ranges HV / UHV / EUV up to 10E-11 mbar • Magnetism: magnetic • Lubrication: liquid up to 10E-8 / dry up to 10E-11 mbar • Max. bake-out temperature: 120°C Options: • Material selection and vacuum lubrication adapted to the application • Individual adaptation to the installation situation in the chamber • Version for clean room ISO 14644-1 (up to class 1 on request) • Optional with controller FMC400/450 Technical Data • Travel: 60 mm - 130 mm • Repeatability: ± 2.8 µm, ± 0,4 µm (unidirectional) ± 4 µm, ± 0,5 µm (bidirectional) • Load: → 196 N / ↑ 196 N • Max. Speed: 10 mm/s • Motor: Stepper Motor • Bearing: cross roller bearings stainless steel, hybrid • Feedback: Linear Scale • Feedback Resolution: ± 0.1 µm