Linear positioning stage LA97

piezoelectric1-axisprecision

LA97 Nanometer linear stage Application: scanning Benefit: Nanometer-positioning, also vertically Features: positioning with extreme resolution and highest stiffnes can be can be equipped with 2 (or 4) motors • Vacuum: all pressure ranges HV / UHV down to 10E-11 mbar • Magnetism: magnetic | low-magnetic | magnet-free • Lubrication: liquid down to 10E-8 / dry lube down to 10E-11 mbar • Max. bake-out temperature: 120°C Options: • Magnetic, low-magnetic and magnet-free versions available • Material selection and vacuum lubrication adapted to the application • Individual adaptation to the installation situation in the chamber • Version for clean room ISO 14644-1 (up to class 1 on request) • Optional with controller FMC400/450 Technical Data • Travel: 100 mm - 300 mm • Repeatability: ± 0.015 µm (unidirectional) ± 0,02 µm (bidirectional) • Load: → 98 N / ↑ 58 N • Max. Speed: 10 mm/s • Motor: Piezo Motor • Bearing: cross roller bearings stainless steel, hybrid , optional full ceramic • Feedback: Linear Scale • Feedback Resolution: ± 0.1 µm